Buffered oxide etch 10:1 (BOE 10:1) semiconductor grade

Supplier: AHSI SPA

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000BOE-QT 000BOE-GAL

76541-080EA 47 USD

76541-080 76540-945

Buffered oxide etch 10:1 (BOE 10:1) semiconductor grade

Buffered oxide etch

Buffered Oxide Etchant 10:1 is a reduced-speed etchant for oxide films. 10:1 ratio of ammonium fluoride: HF.

Boiling Pt: 103…105 °C
Melting Pt: –35 °C
Density: 1.11…1.12 g/cc

UN: 2817
ADR: 8, 6.1,II

Specification Test Results

Color	≤ 10 APHA
Aluminum	≤ 3.1 ppb
Antimony	≤ 10 ppb
Arsenic	≤ 2 ppb
Barium	≤ 0.5 ppb
Beryllium	≤ 1 ppb
Bismuth	≤ 1 ppb
Boron	≤ 5 ppb
Cadmium	≤ 1 ppb
Calcium	≤ 3 ppb
Chloride	≤ 2 ppm
Chromium	≤ 2 ppb
Cobalt	≤ 2 ppb
Copper	≤ 5 ppb
Gallium	≤ 2 ppb
Germanium	≤ 2 ppb
Gold	≤ 2 ppb
Iron	≤ 5 ppb
Lead	≤ 2 ppb
Lithium	≤ 1 ppb
Magnesium	≤ 1 ppb
Manganese	≤ 2 ppb
Molybdeum	≤ 1 ppb
Nickel	≤ 1 ppb
Nitrate	≤ 3 ppm
Phosphate	≤ 0.4 ppm
Potassium	≤ 2 ppb
Silver	≤ 1 ppb
Sodium	≤ 5 ppb
Strontium	≤ 1 ppb
Sulfate	≤ 0.5 ppm
Thallium	≤ 2 ppb
Tin	≤ 2 ppb
Titanium	≤ 5 ppb
Vanadium	≤ 2 ppb
Zinc	≤ 2 ppb
Zirconium	≤ 2 ppb
Particle >0.5	≤ 100 Particle/ml
Particle >1.0	≤ 15 Particle/ml

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