3M™ Betapure™ AUL Series Filter Cartridge

Supplier: SOLVENTUM PURIFICATION INC

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3M™ Betapure™ AUL Series Filter Cartridge

3M™ Betapure™ AUL Series Filter Cartridge

7100057150 7010381675 7100046478 7010381673

76032-093CS 2355.86 USD

76032-093 76032-095 76032-097 76033-665 76033-683

3M™ Betapure™ AUL Series Filter Cartridge

Filters Filter Cartridges

Betapure™ AUL series filters represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields.

Rigid, targeted multi–zone structure
Consistent filtration from start to finish
Superior classification of slurry particles, reducing LPCs
Built to controlled specifications to enable repeatable performance in the planarization process

Betapure™ AUL series filters feature 3M's bi–component fiber technology with targeted multi–zone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

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